EFEM/Sorter

Highly Modulized and Versatile

The IR-12000 wafer sorting system provides fabs the ultimate in manufacturing control. This fully automated, host-controlled wafer management system exceeds ISO class 1 protocols. It performs operations such as lot creation, splits, merges, transfers, verification, incident recovery, randomization, lot compression, and complete test wafer management.

Low Cost of Ownership (COO),

IR-820 Robot requires
- Low preventative maintenance
- No overhauls over its lifecycle
- No consumables

Highly configurable to your needs
- Supports FOUP, FOSB, SMIF, or open cassette

Multipurpose or bridge tool
- 150mm-200mm
- 200mm-300mm

User-friendly, multi-language touch screen simplifies operator interface

Detects cross and double-slotted wafers

ISO Class 1 robot can reach 3 FOUPs without track - Optional ISO Class 1 environment
- Smallest footprint in the market

Optional 300mm GEM/SECS interface, accommodates
- Integrated metrology
- Interface with process tool

Compliant with CE and SEMI safety standards

3-FOUP and 2-FOUP Reach without a track