End Effector

Vaccum End Effector:

-1 or 2 sided
-Single or dual end effector
-PEEK contact points
-Aluminum, stainless, or titanium base material
-Other base materials on request -Standard or custom made available

Edge-gripping End Effector:

-Self-centering
-ISO Class 1 cleanliness
-Durability (36+ Million Cycles)
-Failsafe interlocks
-Modular design
-Communication interface with IR-820C -controllers
-Soft touch backside contact zone of 0.3 mm

Contactless Vortex End Effector:

-Loading and unloading of thin or warped wafers in FOUP or cassettes 
-Single wafer transfer between process stations
-Solar cell and other thin substrate handling
-Reticle handling

Download Vortex Endeffector Datasheet

Single and Dual End Effector with Mapper

Non-contact Edge Gripper

Picture	Model	Description	Option
	IEG-300B	Three points self centered Edge Grip Wafer Handling Systems (Gripper) for 300 mm wafer. Basic Model	side thru-beam optional
	IEG-3200C	This system combines three points self centered Edge Grip Wafer Handling Systems (Gripper) for 300 mm wafer and Vacuum Chuck for 50/100/150/200 mm calibration (test) wafers. Perfect for metrology applications	thru-beam to define wafer elevation in the cassette
	IEG-300U	U-shaped Edge Grip Wafer Handling Systems (Gripper) for 300 mm wafer enhanced by build-in through-beam mapping sensor	thru-beam optional
	IEG-200B	Three points self centered Edge Grip Wafer Handling Systems (Gripper) for 200 mm wafer.	side thru-beam optional
	IEG-200SL	Super Low profile 1.6mm (0.063") Edge Grip Wafer Gripper for 200 mm wafer with flat.	available for 150mm