Innovative Robotics manufactures SCARA (Selectively Compliant, Articulated Robot Arm) robots for atmospheric wafer transport and mask or reticle handling, and used for tool automation in the semiconductor, nano-technology, photovoltaics (PV) solar cell, fuel cell, data storage, opto-electronics, liquid crystal display/ light emitting diode (LCD/LED), pharmaceutical and biotech industries.

IR-820 series robots are CE-compliant, user friendly, exceptionally reliable, and maintenance free. ISO-class 1 cleanliness minimizes any particle contamination in the mini-environment to increase wafer yield. Each of IR-820’s three individual Theta axes rotates 640 degrees, eliminating “dead zones”, and can reach 3-FOUP/FOSB in an EFEM (Equipment Front-End Module) without a linear track, allowing the smallest footprint for 300mm wafer equipment automation.

The IR-820 robot's blended motion trajectory optimization provides ultra high wafer throughput, coupled with optional fast-swap dual wrist, makes it ideal for wafer sorters, wafer stockers and all other Automated Material Handling Systems (AHMS). In addition, its 270-degree wafer flipping option is the best choice for wafer cleaning and wafer metrology and inspection applications.

The IR-820 family of robots are modular in design with configuration options of single wrist, dual wrist, 5th –axis flipper, external vertical and horizontal track, all robots are compatible with vacuum, pneumatic, Bernoulli and non-contact edge grip end-effectors, prealigners (notch and flat finder) and mapping sensors.IR-820 robot can handle from 50mm to 300mm wafer/cell size, 200-micron-thick thin wafer to 50-micron ones, substrate material from silicon to gallium nitride (GaN). Our proprietary emulating/ translating engine permits an IR-820 robot as a drop-in replacement.