The Company

Understanding the limitations imposed by most cleanroom robot producers, Innovative Robotics sought to provide a product that was more robust, more flexible, and easier to program since 1998. Today, the Silicon-Valley-based Innovative Robotics offers the market a US-patented, field-proven, best of breed wafer handling automation solution that serves semiconductor, LED's, photovoltaics (PV), data storage and biotech industries.

Push The Envelope....

Thin-Wafer-for-MEMSInnovative Robotics’ IR-820 family of robots & accessories were originally designed to satisfy the needs of equipment OEM’s who targeted the 300mm wafer processing market. Thanks to the high-flexibility and modular design, IR-820 now is a perfect platform for speedy and economic development of new handling solution to meet with requirements for emerging MEMS, LED and advanced wafer level packaging. With more than one decade's silicon semiconductor experience, the team is honored to be a pioneer in the thin wafer world: releasing the sub 100 micron thin 150mm/200mm wafer flipping solution in 2007, and 300mm's in 2011. The team also took the advantage of IR-820 family's legacy thin & thick wafer handling technique to tackle the new challenges from the most advanced MEMS manufacturing. Working with Innovative Robotics' team is easy and peronalized. We pride ourselves to be your engineering wing for automation so you can stay focused on your core technology.