IR-820 Robot Family Feature

High Throughput

The IR-820 series SCARA robots combine innovative mechanical design with user friendly, proprietary motion control software, to bring you the best of breed wafer handling robots. Four independently driven axes provide adaptability and flexibility not possible with 3-axis, R-Theta robot designs. The IR-820C controller is the brain behind the IR-820’s mechanical muscle. Advanced trajectory planning algorithms let you blend multiple moves together smoothly for enhanced throughput.

Compact Footprint With True SCARA (Selectively Compliant Articulated Robot Arm) Design

Four independently driven axes provide adaptability and flexibility not possible with 3-axis, R-Theta robot designs. Each of IR-820’s three individual Theta axes rotates 640 (+/- 320) degrees, eliminating “dead zones”, and can reach 3-FOUP/FOSB in an EFEM (Equipment Front-End Module) without a linear track









Robust Design

IR-820 family uses its US-patented “concentric assembly” concept for a streamlined and structurally rigid assembly design; its brushless motors are tightly coupled to each drive axis with a patented belt tensioning system, which provides higher repeatability and reduced wear. The IR-820’s rigid “spine” design offers excellent planarity and low droop over time. The arm’s unique belt tensioning mechanism delivers symmetrical outward forces on the belt to ensure even tension and wear. Its battery-backed absolute positioning encoders can reduce startup time after power outage. Little or no preventative maintenance required for the designed robot life cycle.:
– No semi-annual overhauls
– No re-lubrication
– No adjustments
– Battery replacement only as needed

Tool's Cost Of Ownership (COO) is substantially reduced through reduced recurring costs

Easy Integration

IR-820 SCARA robot offers high-level command for easy integration and offers a user-customizable recovery capability, making recovery from anomalous situations as easy as it is for r-theta robots. It also can set user outputs automatically based on robot poses, which allows OEMs to use PLCs for control of pod door openers, loadlocks etc.

Serial (RS-232) or Ethernet connection

For interfacing to the tool’s host computer, you can use RJ-45 (Ethernet) or D-sub connectors (RS-232) . Communication can be through any terminal emulation program, or through a host program that can open a TCP/IP socket or serial connection. Text messages sent back and forth: Controller can be configured to send text messages asynchronously (standard API) or on demand from the host control program (polling API), depending on developer requirements. Software layer for emulating other robot languages allows faster integration into existing tools.